JPH0730681Y2 - スパッタリングカソード - Google Patents

スパッタリングカソード

Info

Publication number
JPH0730681Y2
JPH0730681Y2 JP1988122426U JP12242688U JPH0730681Y2 JP H0730681 Y2 JPH0730681 Y2 JP H0730681Y2 JP 1988122426 U JP1988122426 U JP 1988122426U JP 12242688 U JP12242688 U JP 12242688U JP H0730681 Y2 JPH0730681 Y2 JP H0730681Y2
Authority
JP
Japan
Prior art keywords
target
back plate
protective material
sputtering cathode
peripheral portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988122426U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0246855U (en]
Inventor
敦哉 家納
洋明 北原
信行 高橋
Original Assignee
日電アネルバ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日電アネルバ株式会社 filed Critical 日電アネルバ株式会社
Priority to JP1988122426U priority Critical patent/JPH0730681Y2/ja
Publication of JPH0246855U publication Critical patent/JPH0246855U/ja
Application granted granted Critical
Publication of JPH0730681Y2 publication Critical patent/JPH0730681Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1988122426U 1988-09-19 1988-09-19 スパッタリングカソード Expired - Lifetime JPH0730681Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988122426U JPH0730681Y2 (ja) 1988-09-19 1988-09-19 スパッタリングカソード

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988122426U JPH0730681Y2 (ja) 1988-09-19 1988-09-19 スパッタリングカソード

Publications (2)

Publication Number Publication Date
JPH0246855U JPH0246855U (en]) 1990-03-30
JPH0730681Y2 true JPH0730681Y2 (ja) 1995-07-12

Family

ID=31370347

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988122426U Expired - Lifetime JPH0730681Y2 (ja) 1988-09-19 1988-09-19 スパッタリングカソード

Country Status (1)

Country Link
JP (1) JPH0730681Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8968537B2 (en) * 2011-02-09 2015-03-03 Applied Materials, Inc. PVD sputtering target with a protected backing plate

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5647564A (en) * 1979-09-26 1981-04-30 Ulvac Corp Operation of magnetron-type sputtering device
JPS609873A (ja) * 1983-06-29 1985-01-18 Fujitsu Ltd スパツタ用タ−ゲツトの固定方法

Also Published As

Publication number Publication date
JPH0246855U (en]) 1990-03-30

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